@PhDThesis{Mariano:2017:DeFiDL,
author = "Mariano, Samantha de F{\'a}tima Magalh{\~a}es",
title = "Deposi{\c{c}}{\~a}o de filmes de DLC no interior de tubos via
implanta{\c{c}}{\~a}o i{\^o}nica por imers{\~a}o em plasma com
campo magn{\'e}tico",
school = "Instituto Nacional de Pesquisas Espaciais (INPE)",
year = "2017",
address = "S{\~a}o Jos{\'e} dos Campos",
month = "2017-08-29",
keywords = "3IP\&D, DLC, campo magn{\'e}tico, catodo oco, tubo
met{\'a}lico, 3IP\&D, DLC, magnetic field, hollow cathode,
metallic tube.",
abstract = "Nesta tese {\'e} apresentado um estudo sobre a
deposi{\c{c}}{\~a}o de filmes de carbono amorfo tipo diamante
(a-C:H ou DLC, do ingl{\^e}s Diamond-Like Carbon) no interior de
tubos de a{\c{c}}o inoxid{\'a}vel austen{\'{\i}}tico ABNT 304.
Os filmes de DLC foram depositados usando um sistema de
Implanta{\c{c}}{\~a}o I{\^o}nica por Imers{\~a}o em Plasma e
Deposi{\c{c}}{\~a}o (3IP\\&D) na presen{\c{c}}a de campo
magn{\'e}tico (CM). As deposi{\c{c}}{\~o}es foram monitoradas
utilizando-se amostras tubulares de a{\c{c}}o inoxid{\'a}vel,
com 150 mm de comprimento e 2 mm de espessura. Os casos
experimentais foram agrupados de acordo com o di{\^a}metro
externo dos tubos, sendo T1=110 mm, T2=40 mm e T3=20 mm,
respectivamente. Inicialmente, a ruptura e a
manuten{\c{c}}{\~a}o da descarga foram analisadas detalhadamente
na presen{\c{c}}a de campos el{\'e}trico e magn{\'e}tico
cruzados (ExB), em condi{\c{c}}{\~o}es de plasmas diversos com
diferentes gases de trabalho (arg{\^o}nio, nitrog{\^e}nio,
metano e acetileno). Deste modo, os par{\^a}metros experimentais
foram otimizados para se gerar uma descarga luminescente do tipo
catodo oco, no interior dos tubos, com o aux{\'{\i}}lio de campo
magn{\'e}tico no confinamento do plasma. Ap{\'o}s esta etapa de
avalia{\c{c}}{\~a}o, foram realizados experimentos iniciais para
depositar o filme de DLC no interior dos tubos, com o uso de
pastilhas de a{\c{c}}o inoxid{\'a}vel e l{\^a}minas de
sil{\'{\i}}cio para monitorar o crescimento do filme.
Posteriormente, foram propostos alguns ajustes na
configura{\c{c}}{\~a}o experimental com o objetivo de melhorar a
forma{\c{c}}{\~a}o da descarga e promover condi{\c{c}}{\~o}es
otimizadas para o crescimento do filme de DLC no interior dos
tubos. Os resultados experimentais confirmaram a a{\c{c}}{\~a}o
positiva do mecanismo ExB na melhoria do confinamento do plasma e
na estabilidade das descargas de catodo oco que foram produzidas.
Os filmes de DLC foram analisados quanto {\`a} sua
microestrutura, morfologia, propriedades qu{\'{\i}}micas,
mec{\^a}nicas, de corros{\~a}o e tribol{\'o}gicas. Foi
poss{\'{\i}}vel depositar filmes de DLC na superf{\'{\i}}cie
interna de tubos de a{\c{c}}o inoxid{\'a}vel
austen{\'{\i}}tico ABNT 304 com boa ades{\~a}o e boa
resist{\^e}ncia ao desgaste e {\`a} corros{\~a}o. Estas
propriedades s{\~a}o particularmente interessantes para o
revestimento de superf{\'{\i}}cies internas de
tubula{\c{c}}{\~o}es utilizadas no setor aeroespacial e,
tamb{\'e}m, em diversos segmentos da ind{\'u}stria. ABSTRACT:
The aim of this work is to study the deposition of diamond-like
amorphous carbon films (a-C:H) inside AISI 304 stainless steel
austenitic tubes with the aid of magnetic field. DLC films were
deposited inside tubes by using Plasma Immersion Ion Implantation
and Deposition (PIII\&D) technique. PIII\&D processes were
investigated by using tubular steel samples as substrates (150 mm
length and 2 mm thickness). The experimental cases were classified
according to the tube outer diameters, as T1=110 mm, T2=40 mm and
T3=20 mm, respectively. Firstly, the discharges breakdown and
their stability conditions were analyzed in detail under the
effect of (ExB) crossed fields. Discharges of different working
gases were studied, such as argon, nitrogen, methane and
acetylene. In this way, the experimental parameters were optimized
so that a glow discharge of a hollow cathode type (with wall
confinement) could be generated inside the tubes, by using the
magnetic field for additional plasma confinement. Then, the first
DLC deposition experiments were performed to coat the inner of the
substrate tubes. Steel and silicon samples were used to monitor
the growing of the as-deposited DLC films there. Later, the
configuration for tube assembly was adjusted, from sitting on
insulator to suspended position, and the discharge formation was
enhanced. As a result, improvements on the deposition conditions
inside tubes were obtained. The experimental results show the
positive influence of ExB mechanism on the improvement of plasma
confinement and also on the established hollow cathode discharges.
The so obtained DLC films were analyzed as regards to their
microstructure, morphology, chemical and mechanical properties,
corrosion and wear resistances. The inner surfaces of steel tubes
were properly coated with DLC films, which in turn can act as good
protection layers against corrosion and wear. Such properties are
especially interesting for inner surface coating of aerospace fuel
tubes and also of other industrial components with concave
geometry.",
committee = "Ueda, Mario (presidente/orientador) and Oliveira, Rog{\'e}rio de
Moraes (orientador) and Berni, Luiz {\^A}ngelo and Trava-Airoldi,
Vladimir Jesus and Silva, Maria Margareth da and Kostov, Leide
Lili Gon{\c{c}}alves da Silva",
englishtitle = "Deposition of diamond-like carbon films inside tubes using plasma
immersion ion implantation with magnetic field",
language = "pt",
pages = "193",
ibi = "8JMKD3MGP3W34P/3PE5922",
url = "http://urlib.net/ibi/8JMKD3MGP3W34P/3PE5922",
targetfile = "publicacao.pdf",
urlaccessdate = "27 abr. 2024"
}